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Glow Discharge Processes: Sputtering and Plasma Etching by Brian Chapman (Hardcover, 1980)

Catching Lives Bookshop (1451)

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Price:

£55.00

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Estimated delivery Thu, 8 May - Sat, 10 May

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Condition:

Good

Hardcover with patterned illustrations on front of dust jacket that shows signs of wear and torn at the top and bottom. Brown clothboards with logo on the front, title in gilt lettering to the spine and edgeworn.

About this product

Product Information

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.