Handbook of Semiconductor Wafer Cleaning Technology : Science, Technology and Applications by Werner Kern (1993, Hardcover)
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- Buy it nowHANDBOOK OF SEMICONDUCTOR WAFER CLEANING TECHNOLOGY Werner King 1993
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About this product
Product Identifiers
PublisherElsevier Science & Technology Books
ISBN-100815513313
ISBN-139780815513315
eBay Product ID (ePID)527631
Product Key Features
Number of Pages623 Pages
Publication NameHandbook of Semiconductor Wafer Cleaning Technology : Science, Technology and Applications
LanguageEnglish
SubjectMaterials Science / General, Electronics / Semiconductors, Manufacturing
Publication Year1993
TypeTextbook
AuthorWerner Kern
Subject AreaTechnology & Engineering
FormatHardcover
Dimensions
Item Height1.4 in
Item Weight35.1 Oz
Item Length9.3 in
Item Width6.3 in
Additional Product Features
Intended AudienceScholarly & Professional
LCCN93-004078
IllustratedYes
Table Of ContentOverview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU
SynopsisThis book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
LC Classification NumberTK7871.85.H335 1993
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