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Dry Etching Technology for Semiconductors - 9783319356242

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Item specifics

Condition
New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ...
Book Title
Dry Etching Technology for Semiconductors
ISBN
9783319356242
Subject Area
Material Science
Publication Name
Dry Etching Technology for Semiconductors
Publisher
Springer International Publishing A&G
Subject
Physics
Publication Year
2016
Type
Textbook
Format
Paperback
Language
English
Item Height
235 mm
Author
Kazuo Nojiri
Item Weight
2117 g
Item Width
155 mm
Number of Pages
116 Pages

About this product

Product Information

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

Product Identifiers

Publisher
Springer International Publishing A&G
ISBN-13
9783319356242
eBay Product ID (ePID)
228849140

Product Key Features

Number of Pages
116 Pages
Language
English
Publication Name
Dry Etching Technology for Semiconductors
Publication Year
2016
Subject
Physics
Type
Textbook
Author
Kazuo Nojiri
Subject Area
Material Science
Format
Paperback

Dimensions

Item Height
235 mm
Item Weight
2117 g
Item Width
155 mm

Additional Product Features

Country/Region of Manufacture
Switzerland
Title_Author
Kazuo Nojiri

Item description from the seller

Seller business information

I certify that all my selling activities will comply with all EU laws and regulations.
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BOOKS etc.

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BOOKS etc is an UK online business that is based in ALDERSHOT, Hampshire. We are a family run company that aims to bring customers a fantastic selection of books with great prices, with friendly ...
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    First book went missing/didn't arrive, but Jessica in customer support sorted it out, sending a second copy, it arrived fast and safe, as described, well wrapped, good price and quick customer support. Thank you JessicaπŸ˜πŸŽ‚πŸ‘πŸ₯°πŸ˜Ž
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