Picture 1 of 1

Gallery
Picture 1 of 1

Dry Etching Technology for Semiconductors - 9783319356242
Β£77.27
RRP Β£79.99
Save Β£2.72 (3% OFF)
Condition:
New
A new, unread, unused book in perfect condition with no missing or damaged pages. See the seller's listing for full details.
2 available
Oops! Looks like we're having trouble connecting to our server.
Refresh your browser window to try again.
Postage:
Β£31.91 International Priority Shipping to United States via eBay's Global Shipping Programme.
Located in: Aldershot, United Kingdom
Import charges:
Free amount confirmed at checkout
Delivery:
Estimated between Wed, 7 May and Wed, 14 May to 43230
Includes international tracking
Returns:
60 days return. Buyer pays for return postage. If you use an eBay delivery label, it will be deducted from your refund amount.
Payments:
Get more time to pay. See payment informationfor PayPal Credit - opens in a new window or tab
Shop with confidence
Seller assumes all responsibility for this listing.
eBay item number:314579398948
Item specifics
- Condition
- Book Title
- Dry Etching Technology for Semiconductors
- ISBN
- 9783319356242
- Subject Area
- Material Science
- Publication Name
- Dry Etching Technology for Semiconductors
- Publisher
- Springer International Publishing A&G
- Subject
- Physics
- Publication Year
- 2016
- Type
- Textbook
- Format
- Paperback
- Language
- English
- Item Height
- 235 mm
- Item Weight
- 2117 g
- Item Width
- 155 mm
- Number of Pages
- 116 Pages
About this product
Product Information
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Product Identifiers
Publisher
Springer International Publishing A&G
ISBN-13
9783319356242
eBay Product ID (ePID)
228849140
Product Key Features
Number of Pages
116 Pages
Language
English
Publication Name
Dry Etching Technology for Semiconductors
Publication Year
2016
Subject
Physics
Type
Textbook
Subject Area
Material Science
Format
Paperback
Dimensions
Item Height
235 mm
Item Weight
2117 g
Item Width
155 mm
Additional Product Features
Country/Region of Manufacture
Switzerland
Item description from the seller
Seller business information
VAT number: GB 976952259
I provide invoices with VAT separately displayed.
CRN: 06687355
About this seller
BOOKS etc.
99.5% positive Feedbackβ’1.8M items sold
Registered as a business seller
Seller Feedback (575,427)
- w***r (65)- Feedback left by buyer.Past 6 monthsVerified purchaseItem as described and despatched in quick time. Item arrived within 3 days and was well packaged. Item was much cheaper than I found elsewhere online. I had a query about my order and the seller responded on the same day and sorted everything out. Would happily buy from seller again
- r***y (403)- Feedback left by buyer.Past 6 monthsVerified purchaseFirst book went missing/didn't arrive, but Jessica in customer support sorted it out, sending a second copy, it arrived fast and safe, as described, well wrapped, good price and quick customer support. Thank you Jessicaππππ₯°πRunes: a Handbook - 9781783276974 (#314128475728)
- a***l (61)- Feedback left by buyer.Past 6 monthsVerified purchaseFantastic experience with this seller. I had an issue with the clay in my kit being dried out, which is something they couldn't have known about before me opening the box. I sent them a message and they replied quickly and kindly with a resolution, replacing my kit for me. Overall the kit was fantastic value and arrived brand new, in perfect condition bar the clay. Very trustworthy and helpful.
More to explore:
- Technology Books in English,
- Transport Technology Books,
- Engineering & Technology Non-Fiction Energy Technology Hardcover Books in English,
- Technology School Workbooks Guides,
- Childrens Science & Technology Books,
- Technology Dictionaries & Reference Books,
- Adult Learning and University Technology Book,
- Engineering & Technology Adult Workbooks Books,
- Engineering & Technology Antiquarian & Collectable Books,
- Engineering & Technology Non-Fiction Energy Technology Hardcover Non - 1950-1999 Publication Year Books